| General Characteristic | |
|---|---|
| Stage | Diameter: 100 mm (4 inch) Thickness: 20 mm Weight: 2 kg |
| Scan Range | 200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor) |
| RMS Noice Level* | ≤0.04 nm (High-resolution mode) |
| Repeatability* | XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth) |
| XY Orthogonality | ±0.5° |
| Detection | Optical lever (Low-coherence light) |
| Bow* | ≤2 nm/50 µm |
| Top-view Optical Microscope | Zoom magnification: x1 to x7 |
| Atomic Force Microscope AFM5500M.pdf |
|---|
