Atomic Force Microscopes (AFM5500M)

Atomic Force Microscopes (AFM5500M)


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Product Description

The is an AFM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation and accuracy as well as correlation fo AFM/SEM investigations.

Specification

General Characteristic
Stage Diameter: 100 mm (4 inch) 
Thickness: 20 mm
Weight: 2 kg

Scan Range

200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor)

RMS Noice Level*

≤0.04 nm (High-resolution mode)

Repeatability*

XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth)

XY Orthogonality

±0.5°

Detection

Optical lever (Low-coherence light)

Bow*

≤2 nm/50 µm

Top-view Optical Microscope

Zoom magnification: x1 to x7
Field of vision: 910 µm x 650 µm to 130 µm x 90 µm 
Monitor magnification: x465 to x3255 (27 inch monitor)

Resources

Atomic Force Microscope AFM5500M.pdf

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