The Hitachi research-grade AFM5300E offers significantly improved
sensitivity, accuracy and resolution of electromagnetic property
measurements operated under high-vacuum conditions. Furthermore, it
establishes a benchmark for comprehensive environmental control and is
the only tool on the market affording AFM imaging in air/liquid/vacuum, a
broad temperature range (120°C to 800°C), magnetic field or humidity controls, as well as correlated AFM/SEM/ion milling investigations.
| General Characteristic | |
|---|---|
| Sample Size | 25 mm (diameter) |
| Manual Stage | XY ±2.5 mm |
| Detection | 11.25 (286 mm) |
| Optical Microscope *Top view (Select at least one) | Zoom Microscope (Lens magnification: x7) Metallurgical Microscope (Lens magnification: × 5, × 20, × 50) |
| Temperature Control | Optional Accessories |
| Scan range (select at least one) | 20 µm × 20 µm × 1.5 µm
|
| Detection | Optical Lever |
| Optical Microscope *Top view (Select at least one) | Zoom Microscope |
| Vibration Isolation | Floor-model |
| In Liquid | Optional Accessories ✔ |
| Humidity Control | Optional Accessories 20 to 80 %RH |
| Vacuum | Optional Accessories Turbo-molecular Pump & Rotary Pump (9.9x10-5Pa) |
| Environment Control Unit AFM5300E_compressed (1) (1)_compressed.pdf |
|---|
