Schottky Field Emission Scanning Electron Microscope SU5000

Schottky Field Emission Scanning Electron Microscope SU5000


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Product Description

Innovative analytical FE-SEM allows for a simple transition between high vacuum and variable pressure mode. EM Wizard is a knowledge-based system for SEM imaging that goes beyond basic preset conditions and recipes. Its ease of use opens a new gateway for material research, development, and area beyond our imagination.

Specification

General Characteristic
Magnification

10 – 600.000 X (based on 4” x 5” picture)
18 – 1.000.000 X (800x600 pixels on display)/30 – 1.500.000 X (1,280x960 pixels on display)

Spatial resolution

1.2 nm @30 kV
3.0 nm @ 1kV
2.0 nm @ 1kV with deceleration mode*1
3.0 nm @ 15 kV Variable Pressure mode*2

Emitter

ZrO / W Schottky emitter

Acceleration voltage


0.5 – 30 kV (0.1 kV step)

Landing voltage

0.1 – 2.0 kV with deceleration mode

Maximum probe current

> 200 nA

Detector

Everhart Thornley SE detector (Lower detector);
Top Detector for high resolution imaging Through the lens*1;
Ultra Variable-pressure Detector (UVD)*3;
Retractable five segment Backscattered Electron Detector (PD-BSE)*4;
Energy Dispersive X-ray detector (EDS)*3;
Wavelength Dispersive X-ray detector (WDS)*3;
Electron Backscattered Diffraction Pattern Detector (EBSD)*3

Variable pressure mode

Pressure Range : 10 – 300 Pa

Control

5-axis motorized stage

Movement

X : 0 -100mm; Y : 0-50mm; Z : 3–65mm; T : -20 - 90o ; R : 360o

Speciment Size

up to 200 mm Ф; maximum stage 80 mm height

Notes

*1 : Top detector is option, combined to deceleration function.
*2 : Variable Pressure mode is option
*3 : Option
*4 : PD-BSE is Standart detector in Variable Pressure system

Resources

Schottky Field Emission Scanning Electron Microscope SU5000.pdf

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