The modern FE-SEM requires not only high performance but also a multitude of functionalities including wide-area observation, in-situ analysis, variable pressure, high-resolution imaging at low accelerating voltages, and simultaneous multi-signal collection.
The SU7000 is designed to address these aspects and more by delivering enhanced information for diversified needs in the field of electron microscopy.
Experience the nano-world with the SU7000!
*Images on monitors are inset.
*The device photograph shows configuration with optional items.
| Image resolution | |
|---|---|
| Resolution SE | 0.8 nm@15 kV 0.9 nm@1 kV |
| General Characteristic | |
| Magnification | 20～2,000,000 x |
| Specimen Chamber | Specimen Size : Max. φ200 mm, Max. 67 mm Height |
| Monitor (option) | 23 inch LCD（1,920×1,080) , supports dual monitors operation |
| Image data saving | Pixel size : 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680 |
| Optional accessories | Energy Dispersive X-ray Spectrometer (EDX) Wavelength dispersive X-ray Spectrometer (WDX) Electron Backscattered Diffraction Detector (EBSD) Cathodoluminescence system (CL) Cryogenic Transfer System Compatible with various types of sub-stages |
| Electron Optics | |
| Emitter | ZrO/W Schottky Emitter |
| Accelerating voltage | 0.1～30 kV (0.01 kV step) |
| Probe Current | Max. 200 nA |
| Detectors | |
| Standard detectors | UD (Upper Detector) MD (Middle Detector) LD (Lower Detector) |
| Optional detectors | PD-BSED（Semiconductor type） |
| Specimen stage | |
| Stage control | 5-axis Motor Drive |
| Movable range | X : 0～135 mm Y : 0～110 mm Z : 1.5～40 mm T : -5 ～70° R : 360° |
| Variable Pressure (VP) Mode (Option) | |
| Pressure range | 5～300 Pa |
| Available detectors in VP mode | PD-BSED, UVD, UD, MD,LD |
| Image Display Mode | |
| Large screen display mode | 1,280 x 960 pixels |
| Single image display mode | 800 x 600 pixels |
| Dual image display mode | 800×600 pixels、1,280×960 pixels with dual monitors |
| Quad image display mode | 640×480 pixels |
| Hex image display mode w/dual monitors | 640×480 pixels with dual monitors |
| Ultra-High-Resolution Schottky Scanning Electron Microscope SU7000.pdf |
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