Ultra High Resolution Schottky SEM SU7000

Ultra High Resolution Schottky SEM SU7000


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Product Description

The modern FE-SEM requires not only high performance but also a multitude of functionalities including wide-area observation, in-situ analysis, variable pressure, high-resolution imaging at low accelerating voltages, and simultaneous multi-signal collection.
The SU7000 is designed to address these aspects and more by delivering enhanced information for diversified needs in the field of electron microscopy.
Experience the nano-world with the SU7000!
*Images on monitors are inset.
*The device photograph shows configuration with optional items.

Specification

Image resolution
Resolution SE

0.8 nm@15 kV

0.9 nm@1 kV

General Characteristic
Magnification

20~2,000,000 x

Specimen Chamber

Specimen Size : Max. φ200 mm, Max. 67 mm Height

Monitor (option)

23 inch LCD(1,920×1,080) , supports dual monitors operation

Image data saving

Pixel size : 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680


Optional accessories

Energy Dispersive X-ray Spectrometer (EDX)

Wavelength dispersive X-ray Spectrometer (WDX)

Electron Backscattered Diffraction Detector (EBSD)

Cathodoluminescence system (CL)

Cryogenic Transfer System

Compatible with various types of sub-stages

Electron Optics
Emitter

ZrO/W Schottky Emitter

Accelerating voltage

0.1~30 kV (0.01 kV step)

Probe Current

Max. 200 nA

Detectors
Standard detectors

UD (Upper Detector)

MD (Middle Detector)

LD (Lower Detector)

Optional detectors

PD-BSED(Semiconductor type)
UVD (Ultra Variable Pressure Detector)

Specimen stage
Stage control

5-axis Motor Drive

Movable range

X : 0~135 mm

Y : 0~110 mm

Z : 1.5~40 mm

T : -5 70°

R : 360°

Variable Pressure (VP) Mode (Option)
Pressure range

5~300 Pa

Available detectors in VP mode

PD-BSED, UVD, UD, MD,LD

Image Display Mode
Large screen display mode

1,280 x 960 pixels

Single image display mode

800 x 600 pixels

Dual image display mode

800×600 pixels、1,280×960 pixels with dual monitors

Quad image display mode

640×480 pixels

Hex image display mode w/dual monitors

640×480 pixels with dual monitors

Resources

Ultra-High-Resolution Schottky Scanning Electron Microscope SU7000.pdf

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