The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM lineup. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.
*The device photograph shows configuration with optional items.
| Electron Optics | |
|---|---|
| Secondary Electron Image resolution | 0.6 nm@15 kV 0.7 nm@1 kV (*1) |
| Magnification | 20 to 2,000,000 x |
| Electron Gun | Cold cathode field emission gun with anode heating system |
| Accelerating voltage | 0.5 to 30 kV |
| Landing Voltage(*1) | 0.01 to 20 kV |
| Standard Detectors | |
| Standard detectors | Upper Detector (UD) with ExB filter: SE/BSE signal mixing function |
| Option detector | Top Detector (LD) |
| Optional Accessories(*2) | Energy Dispersive X-ray Spectrometer (EDS) |
| General Characteristic | |
| Specimen stage | Stage Control : 5-axis Motor Drive X : 0 to 110 mm Y : 0 to 110 mm Z : 1.5 to 40 mm T : -5 to 70° R : 360° |
| Specimen Chamber | Specimen Size : Max. φ150 mm(*3) |
| Ultra-high-Resolution Cold Field Emission Scanning Electron Microscope SU8600.pdf |
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