Ultra high resolution cold field emission SEM SU8600

Ultra high resolution cold field emission SEM SU8600


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Product Description

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM lineup. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.
*The device photograph shows configuration with optional items.

Specification

Electron Optics
Secondary Electron Image resolution

0.6 nm@15 kV

0.7 nm@1 kV (*1)

Magnification

20 to 2,000,000 x

Electron Gun

Cold cathode field emission gun with anode heating system

Accelerating voltage

0.5 to 30 kV

Landing Voltage(*1)

0.01 to 20 kV

Standard Detectors
Standard detectors

Upper Detector (UD) with ExB filter: SE/BSE signal mixing function
Lower Detector (LD)

Option detector

Top Detector (LD)
In-Column Middle Detector (IMD)
Out-Column Crystal Type BSED (OCD)
Semiconductor Type BSED (PD-BSED)
Cathodoluminescence Detector (CLD)
STEM Detector


Optional Accessories(*2)

Energy Dispersive X-ray Spectrometer (EDS)
Electron Backscattered Diffraction Detector (EBSD)

General Characteristic
Specimen stage

Stage Control : 5-axis Motor Drive

X : 0 to 110 mm

Y : 0 to 110 mm

Z : 1.5 to 40 mm

T : -5 to 70°

R : 360°

Specimen Chamber

Specimen Size : Max. φ150 mm(*3)

Resources

Ultra-high-Resolution Cold Field Emission Scanning Electron Microscope SU8600.pdf

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